Silicon

E. J. Smythe, M. D. Dickey, G. M. Whitesides, and F. Capasso. 2009. “A Technique to Transfer Metallic Nanoscale Patterns to Small and Non-Planar Surfaces”. ACS Nano, 3, Pp. 59-65

T. K. Whidden, D. K. Ferry, M. N. Kozicki, E. Kim, A. Kumar, J.L. Wilbur, and G. M. Whitesides. 1996. “Pattern Transfer to Silicon by Microcontact Printing and RIE”. Nanotechnology, 7, Pp. 447-51

E. Kim, G. M. Whitesides, M. B. Freiler, M. Levy, J. L. Lin, and R. M. Osgood. 1996. “Fabrication of Micrometer-Scale Structures on GaAs and GaAs AlGaAs Quantum Well Material Using Microcontact Printing”. Nanotechnology, 7, Pp. 266-69

G. M. Whitesides, A. J. Black, P. F. Nealey, and J.L. Wilbur. 1996. “Self-Assembled Monolayers and Lithography”. In The Robert A. Welch Foundation 39th Conference on Chemical Research on Nanophase Chemistry, Pp. 109-21. Houston, TX

K. K. Berggren, R. Youkin, E. Cheung, M. G. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, and M. Tinkham. 1997. “Demonstration of a Nanolithographic System Using a Self-Assembled Monolayer Resist for Neutral Atomic Cesium”. Advanced Materials, 9, Pp. 52-55

J. Tien, A. Terfort, and G. M. Whitesides. 1997. “Microfabrication Through Electrostatic Self-Assembly”. Langmuir, 13, Pp. 5349-55

D. Qin, Y. Xia, J. A. Rogers, R. J. Jackman, X-M. Zhao, and G. M. Whitesides. 1998. “Microfabrication, Microstructures and Microsystems”. In Microsystem Technology in Chemistry and Life Sciences, edited by A. Manz and H. Becker, 194:Pp. 1-20. Berlin: Springer-Verlag

C. Marzolin, S. P. Smith, M. G. Prentiss, and G. M. Whitesides. 1998. “Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors”. Advanced Materials, 10, Pp. 571-74

C. Marzolin, A. Terfort, J. Tien, and G. M. Whitesides. 1998. “Patterning of a Polysiloxane Precursor to Silicate Glasses by Microcontact Printing”. Thin Solid Films, 315, Pp. 9-12

J. A. Rogers, K. E. Paul, and G. M. Whitesides. 1998. “Quantifying Distortions in Soft Lithography”. J. Vac. Sci. Technol. B, 16, Pp. 88-97