Pattern Transfer to Silicon by Microcontact Printing and RIE
Publication information:
T. K. Whidden, D. K. Ferry, M. N. Kozicki, E. Kim, A. Kumar, J.L. Wilbur, and G. M. Whitesides. 1996. “Pattern Transfer to Silicon by Microcontact Printing and RIE”. Nanotechnology, 7, Pp. 447-51
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