Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication
Publication information:
Y. Xia and G. M. Whitesides. 1996. “Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication”. Advanced Materials, 8, Pp. 765-68
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