Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography
Publication information:
J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides. 2001. “Microscope Projection Photolithography for Rapid Prototyping of Masters With Micron-Scale Features for Use in Soft Lithography”. Langmuir, 17, Pp. 6005-12
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