Fabrication of Two-Dimensional Arrays of Microlenses and Their Applications in Photolithography
Publication information:
M-H. Wu and G. M. Whitesides. 2002. “Fabrication of Two-Dimensional Arrays of Microlenses and Their Applications in Photolithography”. Journal of Micromechanics and Microengineering, 12, Pp. 747-58
Notes
820