Using Soft Lithography to Fabricate GaAs/AlGaAs Heterostructure Field Effect Transistors
Publication information:
J. Hu, R. G. Beck, T. Deng, R. M. Westervelt, K. D. Maranowski, A. C. Gossard, and G. M. Whitesides. 1997. “Using Soft Lithography to Fabricate GaAs AlGaAs Heterostructure Field Effect Transistors”. Applied Physics Letters, 71, Pp. 2020-22
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