Using Patterns in Microfiche as Photomasks in 10-mm-Scale Microfabrication
Publication information:
T. Deng, J. Tien, B. Xu, and G. M. Whitesides. 1999. “Using Patterns in Microfiche As Photomasks in 10-Mm-Scale Microfabrication”. Langmuir, 15, Pp. 6575-81
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