Nanometer scale patterning and pattern transfer on amorphous Si, crystalline Si, and SiO2 surfaces using self-assembled monolayers
Publication information:
D. Wang, S. G. Thomas, K. L. Wang, Y. Xia, and G. M. Whitesides. 1997. “Nanometer Scale Patterning and Pattern Transfer on Amorphous Si, Crystalline Si, and SiO2 Surfaces Using Self-Assembled Monolayers”. Applied Physics Letters, 70, Pp. 1593-95
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