Imaging Patterns of Intensity in Topographically Directed Photolithography
Publication information:
K. E. Paul, T. L. Breen, S. P. Smith, T. Hadzik, M. G. Prentiss, and G. M. Whitesides. 2005. “Imaging Patterns of Intensity in Topographically Directed Photolithography”. Journal of Vacuum Science and Technology B., 23, Pp. 918-25
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