Generation of 30-50 nm Structures Using Easily Fabricated, Composite PDMS Masks

Publication information:

T.W. Odom, V. R. Thalladi, J. C. Love, and G. M. Whitesides. 2002. “Generation of 30-50 Nm Structures Using Easily Fabricated, Composite PDMS Masks”. J. Am. Chem. Soc., 124, Pp. 12112-13

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