Connectivity of Features in Microlens Array Reduction Photolithography: Generation of Different Patterns Using a Single Photomask
Publication information:
H. Wu, T.W. Odom, and G. M. Whitesides. 2002. “Connectivity of Features in Microlens Array Reduction Photolithography: Generation of Different Patterns Using a Single Photomask”. J. Am. Chem. Soc., 124, Pp. 7288-89
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