Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems
Publication information:
N. Damean, B. A. Parviz, J. Lee, T.W. Odom, and G. M. Whitesides. 2004. “Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems”. Journal of Micromechanics and Microengineering, 15, Pp. 29-34
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